Nanopositioning Technologies - E-book

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Nanopositioning Technologies - ENG

Fundamentals And Applications

Changhai Ru

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$2,780.00

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Sinopsis

ISBN:	9783319238531
Formato:	Page Fidelity
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Tecnología e ingeniería
Subtema:	Nanotecnología y Sistemas Microelectromecánicos (MEMS)
Año de publicación:	2015-12-22

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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