This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, microfabrication technology of non-silicon materials, MEMS microsensors, MEMS microactuators, recent developments in biomedical, telecommunication, and aerospace fields. This book combines process principles and application examples with rigorous logic. It is suitable for basic learning and knowledge expansion for readers majoring in mechanical engineering, instrument science and technology, electronic science and technology, and physics.